Theory
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Four needles with equal spacing are placed on the sample to be measured, and a current source is connected to the outer pair of needles. Then the voltage generated between the inner pair of needles is measured. The sheet resistance is then measured with the formula:
Sheet Resistance = Constant * (Voltage measured / Current value)
Where the constant is 4.532 if the following conditions are true:
- The diameter of the sample is large compared to distance between the needles.
- The thickness of the sample is small compared to distance between the needles.
- The location of the needles is not too close to the edge of the sample.
If these conditions are not met, please follow the references in the paper to calculate the correction factor required.